Diaphragm valve for manufacturing semiconductor device

专利摘要:
PURPOSE: A diaphragm valve for a semiconductor fabrication system is provided to show an opening/closing state of a valve to a worker by using a valve switching state display window. CONSTITUTION: A diaphragm valve has a plurality of connection portions(210,220) connected with a body(200) and a gas pipe arrangement. The connection portions(210,220) are formed with an inlet(210) and an outlet(220). The inlet(210) and the outlet(220) are connected with the body(200) and a pipe arrangement. A matter is transferred to the outlet(220) if a valve switching portion is opened by a pressure of a gas through from the inlet(210). The valve switching portion is opened or shut by an upper and a lower movement of the diaphragm. A control portion(230) is fixed to an upper portion of the body(200) by a nut and a screw. A valve switching state display window is used for displaying an opening/closing state of a valve.
公开号:KR20020074666A
申请号:KR1020010014589
申请日:2001-03-21
公开日:2002-10-04
发明作者:임범빈
申请人:삼성전자 주식회사；
IPC主号:

专利说明:

Diaphragm valve for manufacturing semiconductor device
[3] The present invention relates to a semiconductor manufacturing apparatus, and more particularly to a diaphragm valve for manufacturing a semiconductor device.
[4] The valve is generally used as a member installed on the passage of the material to control the flow of the material by its open / close operation. The open / close operation of the valve is performed using air. When the open signal comes in, the valve controller opens the appropriate solenoid valve to supply air, which pushes the diaphragm mounted in the diaphragm valve to open the valve.
[5] 1 is a schematic diagram showing a conventional diaphragm valve.
[6] Referring to FIG. 1, the diaphragm valve includes connection parts 110 and 120 to which a gas pipe (not shown) connected to the body 100 is fitted. The connection parts 110 and 120 are formed of an inlet part 110 and an outlet part 120, and are connected to the body 100. Pipes are connected to the inlet 110 and the outlet 120.
[7] The upper portion of the body 100 is connected to the adjusting unit 130 for controlling the flow rate. The adjusting unit 130 is fixed to the body 100 by various fixing parts, for example, nuts and screws.
[8] However, the conventional diaphragm valve has no method of visually confirming the operation state of the valve. Accordingly, the method of confirming the operation of the valve is to dismantle the connected line (line) has no choice but to actually check the flow of gas. This verification method requires a number of additional operations such as purging of the gas line and leak check after the operation.
[9] SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a diaphragm valve for manufacturing a semiconductor device capable of visually confirming an on / off operation state of a valve.
[1] 1 is a schematic diagram showing a conventional diaphragm valve.
[2] 2 and 3 are diagrams illustrating a diaphragm valve for manufacturing a semiconductor device according to a preferred embodiment of the present invention.
[10] In order to achieve the above technical problem, the present invention, the inlet, the body facing the outlet and the valve opening and closing portion is formed, connected to the body to adjust the gas flow to the outlet and the body And a diaphragm valve including a connection part connecting the control part, the diaphragm capable of opening and closing a gas flow, a stem connected to the diaphragm, and a conversion connected to one end of the stem to convert a vertical motion into a left and right motion. And a transparent valve opening / closing state display window provided on the control unit so as to be connected to the member, the mark indicating the on / off of the valve, and the mark indicating the on / off from the outside. A diaphragm valve for manufacturing a semiconductor device is provided.
[11] The mark is divided into two parts by color or text to indicate on / off of the valve.
[12] The converting member may be a cam or a connecting rod capable of converting a vertical motion into a horizontal motion. The conversion member is preferably able to increase the width of the lateral movement than the width of the vertical movement.
[13] The stem is movable up and down, and the mark is provided to be movable in the left and right directions.
[14] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following examples are provided to those skilled in the art to fully understand the present invention and should not be construed as limiting the scope of the present invention. Like numbers refer to like elements in the figures.
[15] 2 and 3 are diagrams illustrating a diaphragm valve for manufacturing a semiconductor device according to a preferred embodiment of the present invention.
[16] Referring to FIG. 2, the diaphragm valve includes connection parts 210 and 220 to which gas pipes (not shown) connected to the body 200 are connected and fixed. The connecting parts 210 and 220 are formed of an inlet 210 and an outlet 220, and are connected to the body 200. Pipes are connected to the inlet 210 and the outlet 220. When the valve opening and closing part (not shown) is opened by a constant pressure of the gas introduced through the inlet part 210, the material is delivered to the outlet part 220. The opening and closing of the valve opening and closing is made by the vertical movement of the diaphragm.
[17] The control unit 230 for controlling the flow rate is connected to the upper portion of the body 200. The adjusting unit 230 is fixed to the body 200 by various fixing parts, for example, nuts and screws. The adjusting unit 230 is provided with a transparent valve opening and closing state display window 240. Through the valve opening and closing state display window 240, the operator can directly check the opening and closing state of the valve.
[18] 3 is a view illustrating a valve opening and closing display device capable of displaying an open / closed state of a valve.
[19] Referring to FIG. 3, opening and closing of the valve opening and closing part is performed by the vertical movement of the diaphragm 250, and the stem 260 connected to the diaphragm 250 also moves up and down according to the vertical movement of the diaphragm 250. One end of the stem 260 is provided with a conversion member 270 that can convert the vertical movement of the stem 260 to the left and right movement. The conversion member 270 may be a cam, a connecting rod, or the like, capable of converting a vertical motion into a horizontal motion. In particular, since the fluctuation range of the vertical movement of the stem 260 is minute, it is preferable to use the conversion member 270 which can make the fluctuation range of the horizontal movement greater than the width of the vertical movement when converting it to the horizontal movement. The conversion member 270 is connected to the mark 280 that can display the on / off of the valve through the valve opening and closing state display window 240 by the connecting portion 290. The mark 280 is divided into two parts using colors or letters so that an operator can recognize it from the outside. For example, the mark 280 may be distinguished from one side by being displayed in red and the other side by being displayed in blue, or the other side by being displayed in OFF and the other side by being displayed in ON.
[20] When opening (on) the valve opening and closing portion, the diaphragm 250 rises upward, and thus the stem 260 connected to the diaphragm 250 also rises upward. At this time, the conversion member 270 converts the upward movement of the stem 260 into the right movement so that the ON mark is positioned on the valve opening / closing state display window 240 so that the operator can visually check the on state. do. On the other hand, when the valve opening and closing (OFF), the diaphragm 250 is lowered in the downward direction, and thus the stem 260 connected to the diaphragm 250 is also lowered in the downward direction. At this time, the conversion member 270 converts the downward movement of the stem 260 into the left movement so that the OFF mark is positioned on the valve opening / closing state display window 240 so that the operator can visually check the OFF state. do. On the other hand, the conversion member 270 may convert the upward movement of the stem 260 to the left movement of the mark 280 or the downward movement to the right movement, in this case the on / off of the mark 280 May be appropriately adjusted to appear through the valve open / close state display window 240 so that an operator may check the open / closed state of the valve.
[21] As mentioned above, although the preferred embodiment of the present invention has been described in detail, the present invention is not limited to the above embodiment, and it is apparent that many modifications are possible by those skilled in the art within the technical idea of the present invention. Do.
[22] According to the diaphragm valve for semiconductor device manufacture by this invention, the on / off operation state of a valve can be visually confirmed directly. Therefore, it is possible to solve the conventional inconvenience of disassembling the diaphragm valve in order to check the operation state of the valve, it is possible to increase the production efficiency because the operator can proceed conveniently.

权利要求:
Claims (5)
[1" claim-type="Currently amended] A diaphragm including an inlet, a body facing the inlet, an outlet and a valve opening and closing portion, an adjustment part connected to the body to adjust a gas flow amount to the outlet, and a connection part connecting the body and the control part; In the valve,
A diaphragm capable of opening and closing a gas flow;
A stem connected to the diaphragm;
A conversion member connected to one end of the stem and capable of converting a vertical motion into a left and right motion;
A mark connected to the conversion member to indicate on / off of the valve; And
And a transparent valve opening / closing state display window provided in the adjusting unit so that the mark indicating the on / off can be seen from the outside.
[2" claim-type="Currently amended] The diaphragm valve for manufacturing a semiconductor device according to claim 1, wherein the mark is divided into two parts by color or by letters to indicate on / off of the valve.
[3" claim-type="Currently amended] The diaphragm valve for manufacturing a semiconductor device according to claim 1, wherein the converting member is a cam or a connecting rod capable of converting a vertical motion into a horizontal motion.
[4" claim-type="Currently amended] 4. The diaphragm valve for manufacturing a semiconductor device according to claim 3, wherein the conversion member can make the width of the lateral movement larger than the width of the vertical movement.
[5" claim-type="Currently amended] The diaphragm valve for manufacturing a semiconductor device according to claim 1, wherein the stem is movable in the vertical direction and the mark is movable in the horizontal direction.

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同族专利:

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2001-03-21|Application filed by 삼성전자 주식회사

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2001-03-21|Priority to KR1020010014589A

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2002-10-04|Publication of KR20020074666A

优先权:

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申请号 | 申请日 | 专利标题

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KR1020010014589A|KR20020074666A|2001-03-21|2001-03-21|Diaphragm valve for manufacturing semiconductor device|